Ex parte HSIN-CHUAN et al. - Page 15

          Appeal No. 2000-1587                                                        
          Application 09/055,254                                                      


          partially etching back the SOG with a recipe having a higher                
          etching rate for the oxide and subsequently curing the                      
          remaining residue SOG.  Accordingly, we do not sustain the                  
          rejection of claims 1 through 17 under 35 U.S.C. § 103 over                 
          Zheng in view of Lur, Perera and Wolf.                                      









                                     CONCLUSION                                       
               In view of the foregoing, the decision of the Examiner                 
          rejecting claims 1 through 17 under 35 U.S.C. § 103 is                      
          reversed.                                                                   
                                      REVERSED                                        





                         JAMES D. THOMAS                    )                         
                         Administrative Patent Judge   )                              
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