The opinion in support of the decision being entered
today was not written for publication in a law
journal and is not binding precedent of the Board.
Paper No. 15
UNITED STATES PATENT AND TRADEMARK OFFICE
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
Ex parte CHIA-SHIUN TSAI, CHAO-CHENG CHEN
and HUN-JAN TOO
Appeal No. 2000-1810
Application No. 09/148,556
ON BRIEF
Before KIMLIN, OWENS and TIMM, Administrative Patent Judges.
KIMLIN, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal from the final rejection of claims 1-
15, all the claims in the present application. Claim 1 is
illustrative:
1. A method for forming a patterned oxygen containing plasma
etchable layer comprising:
-1-
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