Appeal No. 2000-2136 Page 2
Application No. 08/713,882
BACKGROUND
The appellant's invention relates generally to cooldown chambers for use in
integrated circuit fabrication processes (specification, p. 1). A copy of the claims under
appeal is set forth in the appendix to the appellant's brief.
The prior art references of record relied upon by the examiner in rejecting the
appealed claims are:
Weinberg 5,002,010 Mar. 26, 1991
Tepman et al. (Tepman) 5,186,718 Feb. 16, 1993
Claims 1 to 34 stand rejected under 35 U.S.C. § 103 as being unpatentable over
Weinberg and Tepman.
Rather than reiterate the conflicting viewpoints advanced by the examiner and
the appellant regarding the above-noted rejection, we make reference to the answer
(Paper No. 12, mailed May 4, 2000) for the examiner's complete reasoning in support of
the rejection, and to the brief (Paper No. 11, filed March 13, 2000) and reply brief
(Paper No. 13, filed July 10, 2000) for the appellant's arguments thereagainst.
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