The opinion in support of the decision being entered today was not written
for publication and is not binding precedent of the Board.
Paper No. 18
UNITED STATES PATENT AND TRADEMARK OFFICE
__________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
__________
Ex parte BRETT E. HUFF,
KEN SCHATZ,
MIKE MAXIM, and
WILLIAM G. PETRO
___________
Appeal No. 2001-2510
Application No. 09/001,350
__________
ON BRIEF
__________
Before KIMLIN, WALTZ, and TIMM, Administrative Patent Judges.
KIMLIN, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal from the final rejection of claims 7-12, all the claims remaining
in the present application. Claim 7 is illustrative:
7. A method of conducting a sputter etch comprising:
providing a semiconductor wafer having a wafer surface;
providing a sputter etch system including an etch chamber having a wafer
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