Appeal No. 2001-1690
Application 08/859,407
Claim 1 is representative of the subject matter on
appeal and is reproduced below:
1. A method of fabricating a micromechanical device,
comprising the steps of:
a) processing a wafer to form a plurality of partially fabricated
devices, the devices having a micromechanical structure defined
upon a first layer;
b) subdividing the wafer to separate the partially fabricated
devices;
c) mounting the separated partially fabricated devices on a
package with the first layer still in place;
d) undercutting the first layer from the mounted partially
fabricated devices to free the micromechanical structure for
movement; and
e) attaching a lid to the package.
The references relied upon by the examiner are:
Glenn 4,855,544 Aug. 8, 1989
Mignardi 5,389,182 Feb. 14, 1995
Trah et al. (Trah) 5,595,940 Jan. 21, 1997
GROUNDS OF REJECTION
1. Claims 1, 2, 3 and 6 stand rejected under 35 U.S.C.
§ 102(b) as anticipated by Mignardi.
2. Claim 4 stands rejected under 35 U.S.C. § 103 as
unpatentable over Mignardi in view of Trah.
2
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