The opinion in support of the decision being entered today was not written
for publication and is not binding precedent of the Board.
Paper No. 9
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte STEPHEN R. GILBERT, THEODORE S. MOISE
and SCOTT R. SUMMERFELT
____________
Appeal No. 2001-2107
Application No. 09/349,439
____________
ON BRIEF
____________
Before HAIRSTON, RUGGIERO, and GROSS, Administrative Patent Judges.
HAIRSTON, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal from the final rejection of claims 13, 14 and 17 through 23.
The disclosed invention relates to a method of depositing a thin film of a dielectric material
onto a surface from the vapor phase. A first portion of the dielectric film is deposited onto the
surface while applying an RF bias to the surface, and a second portion of the dielectric film is
deposited after the RF bias has been removed from the surface.
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