Ex Parte GILBERT et al - Page 1




                                   The opinion in support of the decision being entered today was not written                        
                                          for publication and is not binding precedent of the Board.                                 

                                                                                                            Paper No. 9              

                                    UNITED STATES PATENT AND TRADEMARK OFFICE                                                        
                                                            ____________                                                             
                                          BEFORE THE BOARD OF PATENT APPEALS                                                         
                                                      AND INTERFERENCES                                                              
                                                            ____________                                                             
                                    Ex parte STEPHEN R. GILBERT, THEODORE S. MOISE                                                   
                                                   and SCOTT R. SUMMERFELT                                                           
                                                            ____________                                                             
                                                        Appeal No. 2001-2107                                                         
                                                     Application No. 09/349,439                                                      
                                                            ____________                                                             
                                                              ON BRIEF                                                               
                                                            ____________                                                             
               Before HAIRSTON, RUGGIERO, and GROSS, Administrative Patent Judges.                                                   
               HAIRSTON, Administrative Patent Judge.                                                                                



                                                      DECISION ON APPEAL                                                             
                       This is an appeal from the final rejection of claims 13, 14 and 17 through 23.                                
                       The disclosed invention relates to a method of depositing a thin film of a dielectric material                
               onto a surface from the vapor phase.  A first portion of the dielectric film is deposited onto the                    
               surface while applying an RF bias to the surface, and a second portion of the dielectric film is                      
               deposited after the RF bias has been removed from the surface.                                                        








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