Appeal No. 2002-1260 Page 2
Application No. 09/137,179
BACKGROUND
Appellants’ invention relates to an etchant composition
comprising: (1) sulfuric acid; (2) a fluorine containing
compound; and (3) hydrogen peroxide or ozone, each in a specified
amount. Claim 1, the sole independent claim on appeal, is
reproduced below:
1. An etchant composition in an aqueous solution
comprising:
a) about 0.01 to about 15 percent by weight of sulfuric
said;
b) about 0.1 to about 100 ppm of a fluorine containing
compound;
and
c) a member selected from the group consisting of about
0.01 to about 20 percent by weight of hydrogen peroxide and
about 1 to about 30 ppm of ozone.
The references of record relied upon by the examiner in
rejecting the appealed claims are:
Molinaro 5,082,518 Jan. 21, 1992
Liaw et al. (Liaw) WO 97/36209 Oct. 02, 1997
(published international application No. PCT/EP97/01190)
Liao et al. (Liao)1 296405 Jan. 21, 1997
(published Taiwan Patent)
1 The examiner refers to this patent as Jaw (Jaw is the
spelling of the first named inventor’s surname in a Derwent
abstract of record). All references to Liao in this decision are
to the English language translation of the patent document
prepared by Diplomatic Language Services, Inc. The record (Form
PTO-892, Paper No. 10) indicates that a copy of that translation
was forwarded to appellants with the examiner’s answer.
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