The opinion in support of the decision being entered today was
not written for publication and is not binding precedent of the
Board.
Paper No. 12
UNITED STATES PATENT AND TRADEMARK OFFICE
__________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
__________
Ex parte RAYMON F. THOMPSON,
ROBERT W. BERNER, GARY L. CURTIS,
STEPHEN P. CULLITON and BLAINE G. WRIGHT
__________
Appeal No. 2002-1823
Application 09/575,551
___________
ON BRIEF
___________
Before FRANKFORT, STAAB, and MCQUADE, Administrative Patent
Judges.
MCQUADE, Administrative Patent Judge.
DECISION ON APPEAL
Raymon F. Thompson et al. appeal from the final rejection of
claims 56, 57, 62, 64 and 65, all of the claims pending in the
application.
THE INVENTION
The invention relates to “automated semiconductor wafer
processing systems for performing liquid and gaseous processing
of . . . semiconductor wafers, data disks, semiconductor
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