Appeal No. 2003-0688
Application No. 09/324,889
a plurality of conductive contacts adapted to
support a substrate and disposed on the body and at
least partially above the blade surface which provide
an electrical flow path through the contacts and the
blade.
31. A substrate processing system, comprising:
a) a chamber;
b) a robot disposed in the chamber; and
c) a robot blade connected to the robot, comprising:
iii) a body having a blade surface that is at least
partially semi-conductive;
iv) a plurality of conductive contacts adapted to
support a substrate and disposed on the body and at
least partially above the blade surface which provide
an electrical flow path through the body and the
contacts provide an electrical flow path.
The examiner relies on the following references as evidence
of unpatentability:
Wada 5,380,137 Jan. 10, 1995
Kitayama et al. (Kitayama) 5,445,486 Aug. 29, 1995
Ohsawa 5,540,098 Jul. 30, 1996
Claims 24 through 46 stand rejected under 35 U.S.C. § 112,
second paragraph (indefiniteness).
Claims 24, 26 through 29, 39, and 41 through 44 stand
rejected under 35 U.S.C. § 103 as being unpatentable over
Kitayama.
Claims 25, 30, 40 and 45 stand rejected under 35 U.S.C.
§ 103 as being unpatentable over Kitayama in view of Wada.
Claims 31, 33 through 36, 38, 46 stand rejected under 35
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