The opinion in support of the decision being entered today was not written
for publication and is not binding precedent of the Board.
Paper No. 13
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte Yie-Shein Her, Ramanathan Srinivasan, Suryadevara Babu,
and Suresh Ramarajan
____________
Appeal No. 2003-1092
Application No. 09/692,730
____________
ON BRIEF
____________
Before GARRIS, OWENS, and WALTZ, Administrative Patent Judges.
GARRIS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on an appeal from the final rejection of
claims 2, 4-16 and 18-20 which are all of the claims remaining in
the application.
The subject matter on appeal relates to a chemical-mechanical
polishing slurry comprising an amount of an agent selected from the
group consisting of lysine and arginine sufficient to suppress the
rate at which an underlying silicon-containing dielectric layer is
removed by at least about 50%. This appealed subject matter is
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