The opinion in support of the decision being entered today was not written for publication and is not binding precedent of the Board. Paper No. 23 UNITED STATES PATENT AND TRADEMARK OFFICE __________ BEFORE THE BOARD OF PATENT APPEALS AND INTERFERENCES __________ Ex parte TAKASHI KABASAWA, MANABU NONAKA and TAKASHI OKADA __________ Appeal No. 2003-1141 Application 09/572,745 ___________ ON BRIEF ___________ Before COHEN, MCQUADE, and NASE, Administrative Patent Judges. MCQUADE, Administrative Patent Judge. DECISION ON APPEAL Takashi Kabasawa et al. appeal from the final rejection of claims 1, 3 through 11, 13 through 16 and 21 through 29, all of the claims pending in the application. THE INVENTION The invention relates to a vacuum pump which can be used, for example, to evacuate a semiconductor processing chamber.Page: 1 2 3 4 5 6 7 8 9 NextLast modified: November 3, 2007