The opinion in support of the decision being entered
today was not written for publication in a law journal
and is not binding precedent of the Board.
Paper No. 15
UNITED STATES PATENT AND TRADEMARK OFFICE
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
Ex parte TIEN-EN HSIAO
Appeal No. 2003-1884
Application No. 09/837,943
ON BRIEF
Before KIMLIN, GARRIS and WALTZ, Administrative Patent Judges.
KIMLIN, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal from the final rejection of claims 1-25,
all the claims in the present application. Claim 1 is
illustrative:
1. A cooling system for supplying a reaction chamber with
coolant during a semiconductor fabrication process; said cooling
system comprising:
coolant supply circuitry which controls supply of said
coolant;
a coolant flow controller having a setpoint control to set a
flow of said coolant by transmitting a voltage signal to said
circuitry; and
-1-
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