7. Count 1, the sole count of the interference, is as follows:
Claim 2 of 09/449,763
or
Claim 2 of 5,953,105
8. Lee claim 2 is as follows:
2. A positioning device comprising an object table, a sub-system for processing an
object to be placed on the object table, a drive unit for displacing the object table relative
to the sub-system, and a measuring system for measuring a position of the object table
relative to the sub-system, the drive unit comprising a stationary part which is fastened to
a first frame of the positioning device, while the measuring system comprises a stationary
part and a movable part which is fastened to the object table for cooperation with the
stationary part of the measuring system, characterized in that the stationary part of the
measuring system is fastened to a second frame of the positioning device which is
dynamically isolated from the first frame, and in that the sub-system is fastened to the
second frame.
9. Claim 2 of van Engelen depends from van Engelen claim 1. Van Engelen claim I and
van Engelen claim 2 are as follows:
1. A positioning device comprising an object table, a sub-system for processing an
object to be placed on the object table, a drive unit for displacing the object table relative
to the sub-system, and a measuring system for measuring a position of the object table
relative to the sub-system, the drive unit comprising a stationary part which is fastened to
a machine frame of the positioning device, while the measuring system comprises a
stationary part and a movable part which is fastened to the object table for cooperation
with the stationary part of the measuring system, characterized in that the stationary part
of the measuring system is fastened to a reference frame of the positioning device which
is dynamically isolated from the machine frame.
2. A positioning device as claimed in claim 1, characterized in that the sub-system is
fastened to the reference frame.
10. The claims of the parties are:
Van Engelen: 1-11
Lee: 1-8
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