Appeal No. 2001-0336
Application No. 09/059,865
Appellant argues on pages 1 through 5 of the request that
the Board held that the term "stringer" means undesirable
residual non-dielectric material in accordance with the meaning
found in the specification and in accordance with the manner in
which the term is commonly understood by those of ordinary skill
in the art of semiconductor fabrication. Appellant points to
page 13, line 29 to page 14, line 2 of the specification which
describes stringers as being undesirable because they cause
problems, such as gate leakage for example. Appellant directs
the Board to page 22 of Plasma Processing Material; Scientific
Opportunities and Technological Challenges, Exhibit 1, which
describes "stringer" residue as being undesirable residual non-
dielectric material.
Upon our careful review of the specification and extrinsic
evidence now made of record, we agree with the Appellant that the
proper meaning of the claimed term "stringer" is an undesirable
residual non-dielectric material. We note that claim 12 requires
the limitation "removing a portion of the layer of non-dielectric
material, leaving stringers of the non-dielectric material in the
creases." We find that the scope of this limitation is removing
a portion of the layer of non-dielectric material, leaving an
undesirable residual non-dielectric material in the creases.
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