The opinion in support of the decision being entered
today was not written for publication in a law journal
and is not binding precedent of the Board.
Paper No. 21
UNITED STATES PATENT AND TRADEMARK OFFICE
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
Ex parte SHU-YUAN YANG
and
CHAUCER CHUNG
Appeal No. 2004-0216
Application No. 09/460,112
ON BRIEF
Before KIMLIN, GARRIS and JEFFREY T. SMITH, Administrative Patent
Judges.
KIMLIN, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal from the final rejection of claims 1-14.
Claim 1 is illustrative:
1. A method for forming a shallow trench isolation using a SiON
anti-reflective coating which eliminates water spot defects,
comprising the steps of:
a. forming a pad oxide layer over a substrate;
b. forming a silicon nitride layer on said pad oxide layer;
-1-
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