Appeal No. 2004-0595
Application No. 09/747,201
a) a mounting means for mounting the cassette;
b) an X-Y stage having an X-drive, a Y-drive, and a bed,
wherein the bed is movable in an X direction and a Y
direction by the X-drive and the Y-drive respectively;
c) an effector for handling the flat object, the effector
being attached to the bed and being rotatable about a
Z-axis with respect to the bed, the X-Y stage being
disposed relative to the mounting means such that the
X-Y stage causes the effector to pull the flat object
from the cassette mounted in the mounting means; and
d) a chuck for receiving and holding the flat object for
measurements, the chuck being attached to the bed and
disposed such that the effector places the flat object
onto the chuck, wherein movements of the bed in the X
direction and the Y direction allow the measurements at
at least two points on the flat object.
11. An X-Y stage for handling, positioning and examining flat
objects, comprising:
a) an X-drive;
b) a Y-drive;
c) a bed attached to the X-drive and Y-drive such that the
bed is movable in an X direction and a Y direction by
the X-drive and the Y-drive respectively;
d) an effector for handling the flat objects, the effector
being attached to the bed and being rotatable about a
Z-axis with respect to the bed; and
e) a chuck disposed on the bed for receiving and holding
the flat objects for measurements, the chuck being
attached to the bed and disposed such that the effector
places the flat object onto the chuck, wherein movements
of the bed in the X and Y directions allow the
measurements at at least two points on the flat objects.
-2-
Page: Previous 1 2 3 4 5 6 7 8 Next
Last modified: November 3, 2007