The opinion in support of the decision being entered today was
not written for publication and is not binding precedent of the
Board.
Paper No. 17
UNITED STATES PATENT AND TRADEMARK OFFICE
__________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
__________
Ex parte JEROME ALIEU, CHRISTOPHE LAIR and MICHEL HAOND
__________
Appeal No. 2004-0605
Application 09/411,129
___________
ON BRIEF
___________
Before OWENS, DELMENDO, JEFFREY T. SMITH, Administrative Patent
Judges.
OWENS, Administrative Patent Judge.
DECISION ON APPEAL
This appeal is from the final rejection of claims 13-30,
which are all of the claims pending in the application.
THE INVENTION
The appellants claim a process for forming an air-filled
region between a pair of conductors of an integrated circuit by
depositing a sacrificial layer consisting essentially of
polycrystalline germanium in a region between the conductors and
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