The opinion in support of the decision being entered today was not written
for publication and is not binding precedent of the Board.
Paper No. 21
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte STEVEN KIRK BOWLING
____________
Appeal No. 2004-1741
Application No. 09/466,440
____________
ON BRIEF
____________
Before CAROFF, KIMLIN, and PAWLIKOWSKI, Administrative Patent
Judges.
CAROFF, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on appeal from the examiner’s final
rejection of claims 1-26, all the claims pending in appellant’s
application.
The claims on appeal relate to a method for selectively
etching a substrate having a tungsten silicide layer with a plasma
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