Appeal No. 2005-0090
Application No. 10/057,025
Appellants’ invention relates to an integrated micro-droplet generator. An
understanding of the invention can be derived from a reading of exemplary claim 11,
which is reproduced below.
11. A thermal bubble inkjet head having a symmetrical off-shooter
heater comprising:
a silicon substrate having a top surface and a bottom surface;
a first insulating material layer of at least 1000 D thick on said top
surface;
a funnel-shaped manifold formed in said silicon substrate;
a symmetrical ring-shaped heater formed on said first insulating
material layer on said top surface;
an interconnect formed of a conductive metal in electrical
communication with said ring-shaped heater;
a second insulating material layer on top of said ring-shaped heater
and said first insulating material layer;
a first photoresist layer of at least 2000 D thick on top of said
second insulating material layer;
an ink chamber formed in said first photoresist layer in fluid
communication with said funnel-shaped manifold;
a metal seed layer on said first photoresist layer and an inkjet
orifice formed in said metal seed layer; and
a Ni layer on top of said metal seed layer with an aperture formed
therein in fluid communication with said inkjet orifice.
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