The opinion in support of the decision being entered today was
not written for publication and is not binding precedent of the
Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
__________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
__________
Ex parte RONALD P. MANGINELL,
W. KENT SCHUBERT, and RANDY J. SHUL
__________
Appeal No. 2005-0237
Application No. 10/165,861
__________
ON BRIEF
__________
Before GARRIS, WARREN, and DELMENDO, Administrative Patent
Judges.
GARRIS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on an appeal which involves claims 1-5.
The subject matter on appeal relates to a method for
fabrication of silicon-based microstructures comprising the
deposition and patterning of an etching delay layer on a surface
of a substrate. The method further comprises an etching process,
the thickness and location of the etching delay layer being
1
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