The opinion in support of the decision being entered today was not written for publication in a law journal and is not binding precedent of the Board. UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE BOARD OF PATENT APPEALS AND INTERFERENCES Ex parte HIROSHI KUBOTA, KATSUYA TAKEMURA and TAKAO YOSHIHARA Appeal No. 2005-0488 Application No. 09/851,274 ON BRIEF Before KIMLIN, WALTZ and JEFFREY T. SMITH, Administrative Patent Judges. KIMLIN, Administrative Patent Judge. DECISION ON APPEAL This is an appeal from the final rejection of claims 1-4 and 9-20, all the claims pending in the present application. Claim 1 is illustrative: 1. A resist material comprising one or more surfactants having a fluorine substituent and between 10 and 2000 ppm of a non-ionic surfactant comprising one or more non-ionic surfactants having neither a fluorine substituent nor a silicon-containing substituent. -1-Page: 1 2 3 4 5 6 7 8 NextLast modified: November 3, 2007