Appeal No. 2005-0874
Application No. 10/320,073
(1) claims 7-8, 11-13 and 22 stand rejected under 35 U.S.C.
§ 103(a) as unpatentable over Sugimoto in view of Kimura and
Hayes (Answer, page 4);
(2) claims 9-10 stand rejected under Section 103(a) over
Sugimoto in view of Kimura, Hayes and Stone (Answer, page 5);
(3) claims 14 and 16 stand rejected under Section 103(a)
over Sugimoto in view of Kimura, Hayes and Chigira (id.);
(4) claim 15 stands rejected under Section 103(a) over
Sugimoto in view of Kimura, Hayes and Takahashi (Answer, page 6);
(5) claims 19-20 and 23 stand rejected under Section 103(a)
over Sugimoto in view of Kimura (id.); and
(6) claim 21 stands rejected under Section 103(a) over
Sugimoto in view of Kimura and Hayes (Answer, page 7).
Based on the totality of the record, we affirm all
rejections on appeal essentially for the reasons stated in the
Answer and those reasons set forth below.
OPINION
A. The Rejection of claim 22
The examiner finds that Sugimoto discloses a spin coating
apparatus including a heat regulating element, a cylindrical heat
regulation void, a circumferential gas flow path, a temperature
3
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