Appeal No. 2005-2234
Application No. 10/135,005
axis and the second axis, said work stage assembly having a work
stage axis substantially parallel to the third axis, and the
work stage assembly not being tiltable about the first axis or
the second axis;
a first particle beam source for interacting with the
workpiece, said particle beam source having a first particle
beam source axis, the first particle beam source axis oriented
at an acute angle greater than 0 degrees with the third axis;
and
a second particle beam source for interacting with the
workpiece, said second particle beam source having a second
particle beam source axis oriented to form an acute angle
greater than 0 degrees with the third axis, the particle beam
sources being arranged such that one of the particle beam
sources can be used to mill the workpiece and the other particle
beam source can be used to image the workpiece.
Claims 21, 31, 38, and 41 stand rejected under 35 U.S.C
§ 103(a) as being obvious over Kaga.
Claims 22 through 25, 28, 32 through 36, 42, 43, and 48
through 50 stand rejected under 35 U.S.C § 103 as being obvious
over Kaga in view of Hattori and further in view of Hirose.
Claims 26, 27, 37, 46, and 47 stand rejected under 35 U.S.C
§ 103 as being obvious over Kaga in view of Miyoshi.
Claims 29, 30, 39, and 40 stand rejected under 35 U.S.C
§ 103(a) as being obvious over Kaga, Hattori, Hirose, and
further in view of Miyoshi.
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Last modified: November 3, 2007