The opinion in support of the decision being entered today was not
written for publication and is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
_____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
_____________
Ex parte STEFAN DEGENDT and PETER SNEE
_____________
Appeal No. 2006-0363
Application No. 09/022,834
______________
ON BRIEF
_______________
Before KIMLIN, TIMM and JEFFREY T. SMITH, Administrative Patent
Judges.
KIMLIN, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal from the final rejection of claims 27-39
and 41-60. Claim 27 is illustrative:
27. A method for removing organic contaminants from a
substrate, the organic contaminants resulting from a
previous lithographic step, the method comprising the steps
of:
contacting at least one side of said substrate with
a liquid comprising water, ozone and an additive acting as a
scavenger, wherein the proportion of said additive in said
liquid is less than 1% molar weight of said liquid; and
maintaining said liquid at a temperature less than
the boiling point of said liquid.
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