Appeal No. 2006-0473
Application 10/430,558
a single damascene layer coupled to said front-end
structure;
a dual damascene layer coupled to said single damascene
layer, said dual damascene layer comprising trenches and vias
within a dielectric material; and
a dual damascene pattern liner coupled at least partially
between said vias and said dielectric material but not between
said trenches and said dielectric material.
The following references are relied on by the examiner:
Lim et al. (Lim) 6,380,084 Apr. 30, 2002
Merchant et al. (Merchant) 6,686,662 Feb. 3, 2004
(Filed May 21, 2002)
Claims 1, 2, 4, 5, 8, 11, 12, 14 and 15 stand rejected under
35 U.S.C. § 102(b) as being anticipated by Lim. As to all the
other claims on appeal, claims 3, 6, 7, 9, 10, 13 and 16 through
19, the examiner rejects these claims under 35 U.S.C. § 103. As
evidence of obviousness, the examiner relies upon Lim in view of
Merchant.
Rather than repeat the positions of the appellants and the
examiner, reference is made to the brief (no reply brief has been
filed) for appellants’ positions, and to the answer for the
examiner’s positions.
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