The opinion in support of the decision being entered today was not written
for publication and is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte SRINIVAS DODDI, LAWRENCE LANE, VI
VUONG, MIKE LAUGHERY, JUNWEI BAO,KELLY BARRY,
NICKHIL JAKATDAR and EMMANUEL DREGE
____________
Appeal No. 2006-0996
Application No. 10/162,516
____________
ON BRIEF
____________
Before HAIRSTON, JERRY SMITH, and SAADAT, Administrative Patent Judges.
JERRY SMITH, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on the appeal under 35 U.S.C. § 134 from the examiner’s rejection
of claims 1, 6, 8-11, 13, 27, 29, 38-41, 48 and 54. Pending claims 2-5, 7, 12, 28, 46 and
47 have been indicated by the examiner to contain allowable subject matter.
The disclosed invention pertains to a method and apparatus of selecting
wavelengths for use in optical metrology of an integrated circuit structure having a
nominal profile.
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