Appeal No. 2006-1164
Application No. 10/139,185
1. A method of minimizing particle generation during
handling of ultra pure liquids, the method comprising:
introducing a liquid into a container; and
controlling an air-liquid interface to minimize an
amount of particles generated in the liquid.
32. A system for handling ultra pure liquids, which
reduces particle generation in the liquid, the
system comprising:
means for transferring a liquid having an initial
particle concentration, from a first location to a
second location;
means for controlling an air-liquid interface
during transfer of the liquid so that a final particle
concentration of the liquid is not substantially
greater than the initial particle concentration.
46. A method of minimizing particle generation in ultra
pure liquids during handling thereof, the
method comprising:
providing a liquid;
introducing the liquid to a predetermined location; and
controlling an air-liquid interface to control
particle level in the liquid.
The references set forth below are relied upon by the Examiner in the
Section 102 and Section 103 rejections before us:
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