The opinion in support of the decision being entered today was not
written for publication and is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
__________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
__________
Ex parte ERIC JACQUINOT, PASCAL LETOURNEAU,
and MAURICE RIVOIRE
__________
Appeal No. 2006-1360
Application No. 09/427,675
___________
HEARD: JUNE 6, 2006
___________
Before KIMLIN, JEFFREY T. SMITH, and FRANKLIN, Administrative Patent Judges.
FRANKLIN, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal under 35 U.S.C. § 134 from the examiner’s final rejection of claims 17
through 40. Claim 17 is representative of the subject matter on appeal, and is set forth below:
17. A process for mechanical chemical polishing in the integrated circuits
industry, comprising
rubbing a layer with a support impregnated with an abrasive composition, wherein
said layer is (1) a material selected from the group consisting of silicon oxide,
silicon nitride, and a polymer having a low dielectric constant, or (2) one layer of silicon
oxide and another layer of silicon nitride, and
said abrasive composition comprises an aqueous acid suspension of
(i) individualized colloidal silica particles not linked to each other by siloxane
bonds,
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