Appeal No. 2004-0140
Application No. 10/154,729
BACKGROUND
Appellants’ invention relates to a method for making a hallow sputter target
assembly. The scope of Appellants’ invention can be ascertained from
representative claim 27, which is reproduced below:
27. A method of forming a sputter target assembly comprising the
steps of:
providing a first metallic material;
providing a second metallic material;
forming said first metallic material and said second metallic material
into a cup-shaped sputter target assembly including an outer shell
composed of said second metallic material and a sputtering insert
composed of said first material;
bonding said first metallic material to said second metallic material;
wherein said sputtering insert is disposed within said outer shell such
that said sputter target assembly includes an outer substantially
cylindrical wall defined by said outer shell and an inner substantially
cylindrical wall defined by said sputtering insert.
CITED PRIOR ART
As evidence of unpatentability, the Examiner relies on the following prior
art:
Shimomuki et al. (Shimomuki) 6,085,966 July 11, 2000
Filed December 3, 1997
Kulkarni et al. (Kulkarni) 6,283,357 Sep. 04, 2001
Filed August 3, 1999
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