Appeal No. 2004-0140
Application No. 10/154,729
are acceptable bonding methods, but the latter may be more
accepted by the industry due to the added safety factor.
Shrink fit method
- Machine the two materials so there is a 0.060 of an inch
difference between the ID of the Aluminum alloy and the OD of
the sputtering material.
- Heat the Aluminum alloy to 900 oF for about 1 hour or until
part is at temperature
- Place the cold sputtering material into the heated Aluminum
alloy before it cools.
- If needed press the assembly together.
- Air-cool the assembly to room temperature.
Diffusion bond Technique
- Machine the two materials with minimal difference between
the OD of the Aluminum alloy or steel and ID of the sputtering
material.
- Place an insert into the cavity to reduce distortion during
diffusion bonding
- Place all three parts in a Hot Isostatic Press (HIP) can and weld
the vacuum seal can.
- HIP the materials together at a prescribed time, temperature
and pressure (ex. 3 hours at 450 oC and 30 Ksi).
Alternate embodiments of the invention:
- Self enclosed HIP can
- Replace steel can that surround entire assembly by e-beam
welding an Al alloy top to the Al body in vacuum to create
the seal.
- This assembly is then placed in the HIP vessel at the
parameters stated above
Multi piece assembly:
- Slit the Ta body or other sputtering material into two pieces
-Tube
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