Appeal No. 94-1889
Application 07/890,003
effect of shifter portions and the known equivalent
effects of such shifter portions (see Okamoto).
The examiner further argues (supplemental answer, pages 5-6) that
it is well known to change light intensity through the
use of phase shifters in many different positions
(Okamoto). Therefore, it would have been obvious to
one of ordinary skill in the art to use phase shifters
in any position including the bottom of the substrate
with expectation of phase shifting because of the known
use of phase shifting and changing light intensity from
the bottom of the substrate.
As correctly pointed out by appellant (reply brief, paper
no. 19, page 2 of remarks section), Shigetomi=s U-shaped sections
cut out of the substrate are not disclosed as providing phase
shifting as asserted by the examiner, but, rather, are disclosed
only as equalizing the intensity of the transmitted light.
Okamoto teaches that both applying phase-shifting material
to a substrate and cutting sections out of the substrate are
effective for providing phase shifting (col. 12, lines 52-54).
The purpose of the cut-out sections of Shigetomi=s substrate,
however, is to equalize the intensity of the light transmitted
through the phase-shifting sections and the non-phase-shifting
sections of the mask (page 1). The examiner does not explain
why, if phase-shifting material were applied to the side of the
substrate opposite to Shigetomi=s phase-shifting portions, this
light intensity equalization would be provided. Thus, it is not
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Last modified: November 3, 2007