Ex parte WONG - Page 1

                         THIS OPINION WAS NOT WRITTEN FOR PUBLICATION                 
          The opinion in support of the decision being entered today (1) was not written
          for publication in a law journal and (2) is not binding precedent of the Board.
                                                            Paper No. 12              

                      UNITED STATES PATENT AND TRADEMARK OFFICE                       
                         BEFORE THE BOARD OF PATENT APPEALS                           
                                  AND INTERFERENCES                                   
                                  Ex parte MAN WONG                                   
                                 Appeal No. 95-3611                                   
                               Application 07/904,4191                                
                                      ON BRIEF                                        

          Before GARRIS, WEIFFENBACH and PAK, Administrative Patent Judges.           
          GARRIS, Administrative Patent Judge.                                        

                                 DECISION ON APPEAL                                   
               This is a decision on an appeal from the final rejection of            
          claims 1 through 15 which are all of the claims in the                      
               The subject matter on appeal relates to a method for vapor             
          phase wafer cleaning comprising the steps of combining hydrogen             
          fluoride, hydrogen chloride and water vapor, and exposing the               

               1Application for patent filed June 25, 1992.                           

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Last modified: November 3, 2007