Appeal No. 95-3781
Application 07/978,223
characteristics of a sample (Fig. 1, Col. 1, lines 38-41, Col.
3, line 17). The ellipsometer includes a polarizer 3 for
converting a light beam into a polarized light beam (Fig. 1,
Col. 3, lines 20-24) and a beam expander 2 for expanding the
polarized light (Col. 3, line 18). The light beam which has
been polarized by polarizer 3 and expanded by beam expander 2
is reflected from a sample 5 (Fig. 1). Optics 8 condenses the
light beam reflected from the sample so as to have a cross
section smaller than the size of analyzers 12a, 12b and 12c
(Fig. 1). We note that analyzers in an ellipsometer are
typically linear polarizers.3
Korth also disclosed that analyzers 12a, 12b and 12c
whose transmission direction differs by 60E, direct the light
beam to image converters 11a, 11b and 11c (Col. 3, lines 29-
30). Korth does not disclose that the polarizer is ahead of
the beam expander on the optical path as recited in claim 1.
As such Korth discloses the invention as recited in claim 1
except that in Korth the beam is expanded before it is
polarized. The examiner stated:
6 McGraw Hill Encyclopedia of Science and Technology3
356 (7th ed 1997).
-6-
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