Appeal No. 95-4109
Application No. 08/127,640
The subject matter on appeal relates to an aqueous
developer solution for an alkali-developable photoresist
composition which includes conventional ingredients in
combination with an inorganic ammonium salt selected from the
group consisting of ammonium sulfate, ammonium phosphates and
ammonium borates in an amount in the range from 0.01 to 0.20
percent by weight. This appealed subject matter is adequately
represented by independent claim 1 which reads as follows:
1. An aqueous developer solution for an alkali-
developable photoresist composition which comprises, as a
uniform solution:
(a) water as the solvent;
(b) a water-soluble organic basic compound;
(c) a surface active agent; and
(d) an inorganic ammonium salt selected from the group
consisting of ammonium sulfate, ammonium phosphates and
ammonium borates in an amount in the range from 0.01 to 0.20%
by weight based on the total amount of the components (a), (b)
and (c).
The references relied upon by the examiner as evidence of
obviousness are:
Walls 3,954,472 May 4,
1976
Walls 4,308,340 Dec. 29,
1981
2
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