Appeal No. 97-0226
Application No. 08/441,965
The claimed subject matter is directed to a process for
forming a pattern through using, inter alia, a layer of a
photosensitive composition containing a polyimide precursor
and a complex of a polymerizable carboxylic acid functional
compound with a tertiary amino functional group. This subject
matter is related to the subject matter embodied in Appeal No.
97-0225, which is directed to a photosensitive composition
itself. Claim 9 is illustrative of the subject matter on
appeal and reads as follows:
9. A process for forming a pattern which
comprises providing a layer of a
photosensitive composition comprising a
polyimide precursor, and as a modifier
reactive with acid polyimide precursor, a
complex of a polymerizable carboxylic acid
functional compound with a tertiary amino
function group
wherein said complex is represented by the formula:
wherein each of R , R and R is individually selected from the1 2 3
group of alkyl groups, acrylyl and methacryl groups; and R is
4
selected from the
2
Page: Previous 1 2 3 4 5 6 7 8 9 10 11 12 13 Next
Last modified: November 3, 2007