Appeal No. 1996-0200
Application 08/119,444
III.
Claim 4 stands rejected under 35 U.S.C. § 103 as unpatentable over Chen as in 1.
and further in view of Quartarone. Claims 3 and 7-10 stand rejected under
35 U.S.C. § 103 as unpatentable over Chen as in 1. and further in view of Bajza. Claims
14-20 and 32-42 stand rejected under 35 U.S.C. § 103 as unpatentable over Chen and
Bajza. We find that Quartarone and Bajza fail to overcome the deficiencies of Chen,
accordingly, we reverse these rejections as they are premised upon Chen for the reasons
stated in II, supra.
IV.
Claims 22-31 and 45-48 stand rejected under 35 U.S.C. § 103 as unpatentable
over the combination of Ball and Chen.
Claim 22 and 31 are directed to an aluminum susceptor element used in an
apparatus for the treatment of materials used in semiconductor devices, e.g. wafers. The
claim 31 specifically recites an improved aluminum susceptor resistant to high
temperature and cracking comprising an aluminum alloy having a rough surface and an
anodic coating formed on said aluminum susceptor by anodizing said aluminum susceptor
in an organic acid electrolyte and resistant to cracking and peeling at high temperatures.
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