Appeal No. 1996-2086
Application 08/255,588
Claims 1, 8 and 10 are illustrative and read as follows:
1. A method of impurity gettering, comprising the steps of:
(a) providing a substrate with solid gettering material on a surface of said substrate;
(b) heating said substrate and gettering material to a first temperature greater than
the melting point of said gettering material;
(c) then cooling said substrate and gettering material to a second temperature
below said melting point; and
(d) removing said gettering material from said surface.
8. A method of impurity gettering, comprising the steps of:
(a) providing a substrate with solid gettering material on a surface of said substrate;
(b) heating said substrate and gettering material to a first temperature within
150EC of the melting point of said gettering material;
(c) then cooling said substrate and gettering material; and
(d) removing said gettering material from said surface.
10. A method of impurity gettering, comprising the steps of:
(a) providing a substrate in fluid communication with a reservoir of gettering
material;
(b) heating said gettering material to a temperature above its melting point;
(c) then condensing droplets of said gettering material on said substrate;
2
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