Appeal No. 1997-3415
Application No. 08/037,849
Nozue's statement found in column 1, lines 27-29. Appellant
argues that one of ordinary skill in the art would not be
motivated to use a polymer that is described by Nozue as
having inferior properties. Appellant further argues that
Appellant's independent claims 16, 25, and 26 are methods for
forming a dielectric layer on a semiconductor wafer.
Appellant argues that even if a polymer structure having an
aromatic group of silicon ends were shown by Brown, there is
no suggestion by Brown to use this polymer in the manner
recited in Appellant's claims.
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