Appeal No. 1997-3420 Application No. 08/371,227 claim 4 was amended. Claims 4, 6, 7 and 8 remain before us on appeal. The appellants’ invention is directed to a magnetron sputtering apparatus. The claims on appeal have been reproduced in an appendix to the Brief. THE REFERENCES The references relied upon by the examiner to support the final rejection are: Anderle et al. (Anderle) 4,886,592 Dec. 12, 1989 Zejda et al. 4,943,363 Jul. 24, 1990 Zejda 5,112,467 May 12, 1992 Braeuer et al. (Braeuer) 5,164,063 Nov. 17, 1992 Bourez et al. (Bourez) 5,174,880 Dec. 29, 1992 THE REJECTION 2Page: Previous 1 2 3 4 5 6 7 8 9 NextLast modified: November 3, 2007