Appeal No. 1997-3420
Application No. 08/371,227
claim 4 was amended. Claims 4, 6, 7 and 8 remain before us on
appeal.
The appellants’ invention is directed to a magnetron
sputtering apparatus. The claims on appeal have been
reproduced in an appendix to the Brief.
THE REFERENCES
The references relied upon by the examiner to support the
final rejection are:
Anderle et al. (Anderle) 4,886,592 Dec.
12, 1989
Zejda et al. 4,943,363 Jul. 24,
1990
Zejda 5,112,467 May 12,
1992
Braeuer et al. (Braeuer) 5,164,063 Nov.
17, 1992
Bourez et al. (Bourez) 5,174,880 Dec. 29,
1992
THE REJECTION
2
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