Ex parte YOSHIMURA et al. - Page 2




          Appeal No. 1997-3420                                                        
          Application No. 08/371,227                                                  

          claim 4 was amended.  Claims 4, 6, 7 and 8 remain before us on              
          appeal.                                                                     
               The appellants’ invention is directed to a magnetron                   
          sputtering apparatus.  The claims on appeal have been                       
          reproduced in an appendix to the Brief.                                     
                                   THE REFERENCES                                     
               The references relied upon by the examiner to support the              
          final rejection are:                                                        
          Anderle et al. (Anderle)      4,886,592                     Dec.            
          12, 1989                                                                    
          Zejda et al.             4,943,363                     Jul. 24,             
          1990                                                                        
          Zejda                    5,112,467                     May  12,             
          1992                                                                        
          Braeuer et al. (Braeuer)      5,164,063                     Nov.            
          17, 1992                                                                    
          Bourez et al.  (Bourez) 5,174,880                      Dec. 29,             
          1992                                                                        
                                    THE REJECTION                                     





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