Appeal No. 1997-3480
Application No. 08/315,841
This is a decision on the appeal under 35 U.S.C. § 134
from the examiner’s rejection of claims 73, 74, 76-79 and 81-
97, which constitute all the claims remaining in the
application. The disclosed invention pertains to
a method and apparatus for detecting at least an inclination
of an optically multilayered object with respect to a
predetermined reference plane.
Representative claim 73 is reproduced as follows:
73. A method for detecting at least an inclination of an
optically multilayered object with respect to a predetermined
plane, comprising the steps of:
irradiating light on the optically multilayered
object with an incident angle of not less than about 82
degrees;
detecting at least light reflected from the
optically multilayered object; and
obtaining information of the inclination of the
optically multilayered object with respect to the
predetermined plane from the detected light;
wherein the irradiated light is a linearly polarized
2
Page: Previous 1 2 3 4 5 6 7 8 9 10 11 Next
Last modified: November 3, 2007