Appeal No. 1997-3993 Page 2
Application No. 08/462,561
BACKGROUND
The appellants' invention relates to an apparatus for
ashing an organic film as part of a semiconductor device
production process. A copy of the claims under appeal are
contained in the appendix to the appellants' brief.
The prior art references of record relied upon by the
examiner in rejecting the appealed claims are:
Pammer 3,348,984 Oct. 24,
1967
Berleue et al. 4,088,023 May
9, 1978
(Berleue)
Roop et al. 4,116,016 Sep. 26,
1978
(Roop)
Barbee et al. 4,640,221 Feb. 3,
1987
(Barbee)
McCoy et al. 4,646,630 Mar. 3,
1987
(McCoy)
Claims 8 through 10 stand rejected under 35 U.S.C. § 112,
second paragraph, as being indefinite for failing to
particularly point out and distinctly claim the subject matter
which the appellants regard as the invention.
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