Appeal No. 1997-3993 Page 7
Application No. 08/462,561
recitation "adapted for" is intended to express a statement of
intended use. Moreover, it is our opinion that the scope of
claim 10 can be determined from the language of the claim with
a reasonable degree of certainty, thus a rejection of the
claims under appeal under 35 U.S.C. § 112, second paragraph,
is inappropriate.
The obviousness rejections
We will not sustain any of the rejections of claims 8
through 10 under 35 U.S.C. § 103.
Claim 10 recites an apparatus for ashing an organic film
as part of a semiconductor device production process
comprising, inter alia, an evacuatable plasma chamber; a
closed water-containing vessel; a steam outlet connected to
the vessel; a conduit interconnecting the steam outlet and the
plasma chamber; and a temperature-controlled liquid bath for
heating and vaporizing water in the vessel to thereby supply
steam to the plasma chamber.
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