Appeal No. 2000-1482 Page 6
Application No. 08/995,706
apparatus. Figures 3 and 4 of Yap are perspective views of a
wafer cassette holder for securing a wafer cassette on a
platform of a wafer processing equipment according to Yap's
preferred embodiment. As shown therein, a wafer cassette
holder 30 is mounted on a platform 31 of a wafer processing
equipment (not shown) for holding and securing a wafer
cassette 32 on platform 31 within a predefined target area 60.
The wafer cassette holder 30 of Yap includes two guiding
members 30a and 30b screw-mounted separately onto platform 31
to define the predefined target area 60. Yap teaches (column
8, line 64, to column 9, line 12) that
In one preferred embodiment, front wall 41, side
wall 42, and rear guider 43 are mounted on base bar 40
and front wall 51, side wall 52, and rear guider 53 are
mounted on base bar 50. In this embodiment, the
predefined target area 60 can be adjusted by
re-positioning (1) front wall 41, side wall 42, and rear
guider 43 on base bar 40 and (2) front wall 51, side wall
52, and rear guider 53 on base bar 50 such that the
predefined target area 60 can accommodate wafer cassette
32 of various sizes. In other words, when front walls 41
and 51, side walls 42 and 52, and rear guiders 43 and 53
are mounted on base bars 40 and 50, respectively, to
define the predefine target area 60 for a four inch wafer
cassette 32, the position of front walls 41 and 51, side
walls 42 and 52, and rear guiders 43 and 53 can be
adjusted on base bars 40 and 50 to define the predefined
target area 60 for a six inch wafer cassette or an eight
inch wafer cassette, etc.
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Last modified: November 3, 2007