Ex parte MUELLER - Page 7




          Appeal No. 1998-0039                                                        
          Application No. 08/372,701                                                  

          that the high pressure step is accomplished at 10 millitorr                 
          (translation, page 7), which is below the claimed high                      
          pressure of 11 millitorr which is “sufficient to avoid arcing               
          between said substrate and said shield” (see claim 29, step                 
          b), and claim 32).  Finally, Ku does suggest the use of                     
          varying pressures during metal deposition to adjust the                     
          “membrane deflection” but does not teach or suggest the use of              
          high pressure in a first step followed by a conventional low                
          pressure step (see Ku, paragraph bridging pages 2176-2177).                 
               For the foregoing reasons, we determine that the examiner              
          has not established a sufficient factual basis on this record               
          to support a prima facie case of obviousness.  “Where the                   
          legal conclusion [of obviousness] is not supported by facts it              
          cannot stand.”  In re Warner, 379 F.2d 1011, 1017, 154 USPQ                 
          173, 178 (CCPA 1967).  Accordingly, the examiner’s rejection                
          of claims 29-43 under section 103 over the admitted prior art               
          in view of                                                                  
          JP ‘672, JP ‘961 or Ku is reversed.                                         
               The decision of the examiner is reversed.                              
          REVERSED                                                                    



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