Appeal No. 1998-0039 Application No. 08/372,701 that the high pressure step is accomplished at 10 millitorr (translation, page 7), which is below the claimed high pressure of 11 millitorr which is “sufficient to avoid arcing between said substrate and said shield” (see claim 29, step b), and claim 32). Finally, Ku does suggest the use of varying pressures during metal deposition to adjust the “membrane deflection” but does not teach or suggest the use of high pressure in a first step followed by a conventional low pressure step (see Ku, paragraph bridging pages 2176-2177). For the foregoing reasons, we determine that the examiner has not established a sufficient factual basis on this record to support a prima facie case of obviousness. “Where the legal conclusion [of obviousness] is not supported by facts it cannot stand.” In re Warner, 379 F.2d 1011, 1017, 154 USPQ 173, 178 (CCPA 1967). Accordingly, the examiner’s rejection of claims 29-43 under section 103 over the admitted prior art in view of JP ‘672, JP ‘961 or Ku is reversed. The decision of the examiner is reversed. REVERSED 7Page: Previous 1 2 3 4 5 6 7 8 9 10 NextLast modified: November 3, 2007