The opinion in support of the decision being entered today was not written for
publication and is not binding precedent of the Board.
Paper No. 36
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte HIROTAKA KIZUKI, NORIO HAYAFUJI and TATSUYA KIMURA
____________
Appeal No. 1998-0097
Application No. 08/513,036
____________
ON BRIEF
____________
Before GARRIS, PAK and KRATZ, Administrative Patent Judges.
GARRIS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on an appeal from the final rejection
of
claims 5, 7, 17 and 18. The only other claims remaining in
the application, which are claims 1-4, 12, 13, 15, 16 and 21-
26, have been allowed by the Examiner.
The subject matter on appeal relates to a method for
producing a semiconductor device including dry etching an
A1 Ga As (0 # x # 1) layer using a HC1 gas, arsine gas, and
x 1-x
hydrogen supplied at the same time with a partial pressure of
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