Appeal No. 1998-0758
Application 08/434,073
the initial deposition, and the rate and intensity of heating”
(col. 2, lines 53-56). The color of the coating after the
sputtering step is observed through a window or the like, and
indicates the conductivity of the film after the subsequent
heating step (col. 2, lines 18-22; col. 3, lines 8-11). If
the color is not correct, the level of oxygen in the
sputtering apparatus is adjusted accordingly (col. 2, lines
27-28).
Nath discloses an evaporation process for forming a thin
film of a metal oxide such as indium tin oxide wherein metal
vapor reacts with oxygen in a plasma region (col. 12, lines
40-47). The film thickness is monitored by a device such as
an optical or piezoelectric monitor (col. 11, line 64 - col.
12, line 2).
Feuerstein discloses an evaporation process for forming a
film wherein local evaporation power and film thickness values
are displayed as spatially-coordinated bars of charts on a
4
Page: Previous 1 2 3 4 5 6 7 8 Next
Last modified: November 3, 2007