The opinion in support of the decision being entered today was not
written for publication and is not binding precedent of the Board.
Paper No. 31
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte AKINORI EBE, SATOSHI NISHIYAMA,
KIYOSHI OGATA, and YASUO SUZUKI
____________
Appeal No. 1998-1628
Application No. 08/384,597
____________
ON BRIEF
____________
Before HAIRSTON, GROSS, and BLANKENSHIP, Administrative Patent
Judges.
GROSS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on appeal from the examiner's final
rejection of claims 5 through 7, which are all of the claims
pending in this application.
Appellants' invention relates to an apparatus for forming
a film on a substrate. The apparatus includes an ion source
and an evaporation source, which together operate to produce
on the substrate a mixed layer with a ratio M/N ranging from
10 to 1000, where M is the number of evaporation material
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