Appeal No. 1998-1667
Application No. 08/224,211
APPENDIX
1. A method of polishing a ferroelectric material
comprising the steps of:
(a) providing a ferroelectric surface to be polished;
(b) applying an acidic polish solution to said surface
containing from a finite amount greater than zero to about 80%
by volume of an acid taken from the class consisting of
organic acids, mineral acids, reducing acids and oxidizing
acids and combinations thereof, from a finite amount greater
than zero to about 80% by volume of a strong oxidizing agent
and the remainder water; and
(c) polishing said surface with a polishing member
disposed external to and not a part of said polish solution
while said polish solution is on said surface.
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