The opinion in support of the decision being entered today was
not written for publication and is not binding precedent of
the Board.
Paper No. 12
UNITED STATES PATENT AND TRADEMARK OFFICE
__________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
__________
Ex parte JON A. CASEY, GOVINDARAJAN NATARAJAN,
ROBERT W. PASCO and VINCENT P. PETERSON
__________
Appeal No. 1998-1804
Application 08/668,291
___________
ON BRIEF
___________
Before KIMLIN, PAK and OWENS, Administrative Patent Judges.
OWENS, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal from the examiner’s refusal to allow
claims 1-4, 6-17 and 19-27 as amended after final rejection.
These are all of the claims remaining in the application.
THE INVENTION
The claimed invention is directed toward a method and
apparatus for forming cavities in semiconductor substrates
1
Page: 1 2 3 4 5 6 7 8 9 10 Next
Last modified: November 3, 2007