Appeal No. 1998-1804
Application 08/668,291
(specification, page 1, lines 4-6). Claim 1, directed toward
the method, is illustrative:
1. A method of forming a ceramic substrate having
at least one cavity, the method comprising the steps
of:
(a) placing at least one ceramic greensheet having
at least one cavity over a first plate;
(b) placing a planar coated membrane sheet over said
cavity, wherein said coated membrane sheet has an
elongation of greater than 350% at room temperature
and a modulus of less than 1 Gpa. and wherein said
coated membrane sheet is selected from the group
consisting of silicone-coated silicone rubber,
silicone-coated polyurethane, silicone-coated
polyethylene and silicon-coated copolymers of
polyethylene and a second polyolefin;
(c) conforming said coated membrane sheet to said
cavity;
(d) applying pressure to at least the coated
membrane sheet and the at least one ceramic
greensheet, said coated membrane sheet preventing
the collapse of said cavity during this step of
applying pressure.
THE REFERENCES
Thein et al. (Thein) 5,108,532 Apr. 28,
1992
Gauci et al. (Gauci) 5,478,420 Dec. 26,
1995
Johnstone 5,520,763 May 28,
1996
Natarajan et al. (Natarajan) 5,538,582 Jul. 23,
1996
(filed Sep. 14,
2
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